Vacuum Coating System with Magnetron Sputtering and Cassette Loading MAGNA TM 29

Vacuum Coating System with Magnetron Sputtering and Cassette Loading MAGNA TM 29

Brand: MAGNA TM

$90,000 - $300,000 USD

MOQ: 1 pieces

Key Features

Length: 2500 mm

Width: 1100 mm

Height: 1600 mm

Supplier Information

NIITM OJSC

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Description

Group processing of substrates: Ø76mm, Ø100mm, Ø150mm;
Two sluice chambers for loading - unloading of substrates from cassette to cassette;
Conveyor system for continuous transport of wafers;
Pre-heating of wafers by lamp heater and their cleaning by ion source;
Oil-free pumping system;
Consumption power not more than 25 kW.

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