Photolithography Cluster Line - Advanced Processing Modules

Photolithography Cluster Line - Advanced Processing Modules

$300,000 - $1,800,000 USD

MOQ: 1 pieces

Key Features

Weight: 2050 m² living area

Length: 3725 mm

Power consumption, max.: Built-in memory card slot, support microSD/SDHC/SDXC card (up to 256GB); manual recording/alarm recording l

Loading/unloading module (4 cassettes): 1 µGy

Supplier Information

NIIPM OJSC

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Description

A photolithography cluster line is a set of technological modules carrying out various types of photolithographic processing. The modules are placed in a controlled air environment on a common carrier frame of closed configuration and are united by a single transport device in the form of a specialised robot. The photolithography cluster line combines the operations of photoresist mask formation for the technological process with design standards up to 0.35÷0.18 microns on wafers of 150 and 200 mm diameter and represents high-tech equipment for performing the stages of wafer cleaning, adhesion promoter treatment, photoresist application, drying, thermal stabilisation, developer.

Specifications

Weight

2050 m² living area

Length

3725 mm

Power consumption, max.

Built-in memory card slot, support microSD/SDHC/SDXC card (up to 256GB); manual recording/alarm recording l

Loading/unloading module (4 cassettes)

1 µGy

Photoresist module

1 µGy

Anti-reflection coating module

1 µGy

Photoresist developer module

1 µGy

Megasonic processing module

1 µGy

GMDS vapour processing module

1 µGy

Floor type heat treatment module (3 plates)

2 µGy

Floor type heat stabilisation module (3 plates)

2 µGy

Cluster line transport system - centre robot

1 µGy

Bed to accommodate laminar flow purified air supply modules

1 µGy

Unit for setting technological programmes for processing and displaying information

1 µGy

Cluster line operation control unit

1 µGy

Auxiliary equipment for cluster line

1 µGy

Unit for preparation and supply of reagents to working positions of modules

1 µGy

Photoresist and developer thermal stabilisation and level control unit

1 µGy

Unit for receiving and storing spent reagents

1 µGy

Width

2229 mm

Height

2333 mm

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