Vacuum Loading-Unloading Module Single Position RLG.E.443299.001

Brand: GNfab

$9,000 - $30,000 USD

MOQ: 1 pieces

Key Features

Kinematic throughput (time from container clamping to release): 70 -

Opening/closing the container: Yes; no

Filling the container with gas (nitrogen) up to the preset pressure in the range from 0 to 100 Pa to atmospheric pressure when i: 0...100 t

Possibility to pump the gas after opening the container to the set pressure by external means: Yes; no

Supplier Information

QUANT LLC

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Description

Vacuum single-position loading-unloading module RLGE.443299.001 (VMPZV) with vacuum airlocking system with plate moving manipulator inside the module is designed for installation of hermetic container with semiconductor wafer 100 mm

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Vacuum Loading-Unloading Module Single Position RLG.E.443299.001

Key Features

Description

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