Multi-Position Vacuum Loading-Unloading Module RLG.E.443295.001

Multi-Position Vacuum Loading-Unloading Module RLG.E.443295.001

Brand: GNfab

$9,000 - $36,000 USD

MOQ: 1 pieces

Key Features

Possibility to equip up to five positions of technological stations: Yes; no

Airtight sealing of process station workspace volumes from the internal module volume: Yes; no

Kinematic throughput (time from fixation of the container to its release at consecutive passage of all the techniques) 241591:Ki: 150 -

Filling the container with gas (nitrogen) to a specified pressure in the range from 0 to 100 Pa to atmospheric pressure when it : 0...100 t

Supplier Information

QUANT LLC

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Description

Module loading-unloading vacuum multi-position RLGE.443295.001 (VMZVMP) with vacuum locking system, plate moving manipulator inside the module, transport chamber for several positions of technological stations, system of plate moving between technological stations and system of sealing of working volumes of technological stations is designed for installation of hermetic container with semiconductor wafer 100 mm

Specifications

Possibility to equip up to five positions of technological stations

Yes; no

Airtight sealing of process station workspace volumes from the internal module volume

Yes; no

Kinematic throughput (time from fixation of the container to its release at consecutive passage of all the techniques) 241591:Ki

150 -

Filling the container with gas (nitrogen) to a specified pressure in the range from 0 to 100 Pa to atmospheric pressure when it

0...100 t

Possibility to pump the gas after opening the container to the set pressure by external means

Yes; no

Opening/closing the container

Yes; no

Securing the container

Yes; no

Container orientation

Yes; no

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