Name: Multi-layer Structure Physical Vapor Deposition System Feba 4MI-100-G
Brand: Feba
SKU: 110399
Availability: InStock

Multi-layer Structure Physical Vapor Deposition System Feba 4MI-100-G — QUANT LLC

Бренд: Feba

$90,000 - $300,000 USD

MOQ: 1 pieces

Негізгі сипаттамалар

Kinematic productivity (conditional process 40 s/chamber): 30 plates/hour

Introduced defectivity, not more: particles larger than 0.3 µm, no more than 0.1 pcs/cm2

Unevenness of layer application by thickness, not more: 2 %

Unevenness of temperature on the table, not more than: 1.5 °C

Сипаттама

The unit for physical deposition of multilayer structures ??GE.443255.501 (commercial name "Feba 4MI-100-G") is designed for deposition in one vacuum cycle of multilayer structures including adhesive, barrier, conductive, insulating layers of nitrides, oxides, metals and semiconductors, using magnetron sputtering methods (DC, RF, HiPIMS).

Сипаттамалар

Kinematic productivity (conditional process 40 s/chamber)

30 plates/hour

Introduced defectivity, not more

particles larger than 0.3 µm, no more than 0.1 pcs/cm2

Unevenness of layer application by thickness, not more

2 %

Unevenness of temperature on the table, not more than

1.5 °C

Accuracy of temperature maintenance during degassing and material application, not worse than

0.5 °C

Maximum heating temperature during degassing and material application, not less than

350 °C

Possibility of degassing, heating, ion-plasma cleaning before applying layers

yes; no

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Multi-layer Structure Physical Vapor Deposition System Feba 4MI-100-G — QUANT LLC

Негізгі сипаттамалар

Сипаттама

Сипаттамалар

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Multi-functional Robotic Complex for Cutting, Welding, Cleaning, Melting Metal SEKIRUS MRLC

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Lightweight Multifunctional Robot RX-5 for Handling Up to 5kg

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Multi-Position Vacuum Loading-Unloading Module RLG.E.443295.001

Vacuum Loading-Unloading Module Single Position RLG.E.443299.001

Atmospheric Loading-Unloading Module RLG.442291.001

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