Name: Multi-layer Structure Physical Vapor Deposition System Feba 4MI-100-G
Brand: Feba
SKU: 110399
Availability: InStock

Multi-layer Structure Physical Vapor Deposition System Feba 4MI-100-G — QUANT LLC

Brend: Feba

$90,000 - $300,000 USD

MOQ: 1 pieces

Əsas xüsusiyyətlər

Kinematic productivity (conditional process 40 s/chamber): 30 plates/hour

Introduced defectivity, not more: particles larger than 0.3 µm, no more than 0.1 pcs/cm2

Unevenness of layer application by thickness, not more: 2 %

Unevenness of temperature on the table, not more than: 1.5 °C

Təsvir

The unit for physical deposition of multilayer structures ??GE.443255.501 (commercial name "Feba 4MI-100-G") is designed for deposition in one vacuum cycle of multilayer structures including adhesive, barrier, conductive, insulating layers of nitrides, oxides, metals and semiconductors, using magnetron sputtering methods (DC, RF, HiPIMS).

Spesifikasiyalar

Kinematic productivity (conditional process 40 s/chamber)

30 plates/hour

Introduced defectivity, not more

particles larger than 0.3 µm, no more than 0.1 pcs/cm2

Unevenness of layer application by thickness, not more

2 %

Unevenness of temperature on the table, not more than

1.5 °C

Accuracy of temperature maintenance during degassing and material application, not worse than

0.5 °C

Maximum heating temperature during degassing and material application, not less than

350 °C

Possibility of degassing, heating, ion-plasma cleaning before applying layers

yes; no

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Multi-layer Structure Physical Vapor Deposition System Feba 4MI-100-G — QUANT LLC

Əsas xüsusiyyətlər

Təsvir

Spesifikasiyalar

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Mid-Class Multifunctional Robot ROIN with Modular Design

Multi-Position Vacuum Loading-Unloading Module RLG.E.443295.001

Vacuum Loading-Unloading Module Single Position RLG.E.443299.001

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