Name: Multi-layer Structure Physical Vapor Deposition System Feba 4MI-100-G
Brand: Feba
SKU: 110399
Availability: InStock

Multi-layer Structure Physical Vapor Deposition System Feba 4MI-100-G — QUANT LLC

برند: Feba

$90,000 - $300,000 USD

MOQ: 1 pieces

ویژگی‌های کلیدی

Kinematic productivity (conditional process 40 s/chamber): 30 plates/hour

Introduced defectivity, not more: particles larger than 0.3 µm, no more than 0.1 pcs/cm2

Unevenness of layer application by thickness, not more: 2 %

Unevenness of temperature on the table, not more than: 1.5 °C

توضیحات

The unit for physical deposition of multilayer structures ??GE.443255.501 (commercial name "Feba 4MI-100-G") is designed for deposition in one vacuum cycle of multilayer structures including adhesive, barrier, conductive, insulating layers of nitrides, oxides, metals and semiconductors, using magnetron sputtering methods (DC, RF, HiPIMS).

مشخصات

Kinematic productivity (conditional process 40 s/chamber)

30 plates/hour

Introduced defectivity, not more

particles larger than 0.3 µm, no more than 0.1 pcs/cm2

Unevenness of layer application by thickness, not more

2 %

Unevenness of temperature on the table, not more than

1.5 °C

Accuracy of temperature maintenance during degassing and material application, not worse than

0.5 °C

Maximum heating temperature during degassing and material application, not less than

350 °C

Possibility of degassing, heating, ion-plasma cleaning before applying layers

yes; no

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Multi-layer Structure Physical Vapor Deposition System Feba 4MI-100-G — QUANT LLC

ویژگی‌های کلیدی

توضیحات

مشخصات

محصولات مشابه

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Molecular Layer Deposition System for Functional Nanocoatings

Automated PECVD System for Efficient Reactor Plate Handling PLU

Automated PVD Process Installation for Efficient Plate Handling PLU PVD

Multi-functional Robotic Complex for Cutting, Welding, Cleaning, Melting Metal SEKIRUS MRLC

Lightweight Multifunctional Robot for Loading and Unloading - RX-15

Multifunctional Robotic Complex ROYN

Lightweight Multifunctional Robot RX-5 for Handling Up to 5kg

Multi-Functional Coating Application Complex (TSZP)

Mid-Class Multifunctional Robot ROIN with Modular Design

Multi-Position Vacuum Loading-Unloading Module RLG.E.443295.001

Vacuum Loading-Unloading Module Single Position RLG.E.443299.001

Atmospheric Loading-Unloading Module RLG.442291.001

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