Systems for measuring parameters of plates IUS-7R

Features:Measurements by four-probe method (Kelvin method) of specific and surface resistivity of semiconductor or metal samples up to 300 mm in diameter.Universal source-measurer (included in the State Register of measuring instruments of the Russian Federation).Software "Crystal" for automatic calculation of specific and surface resistivity taking into account the size of the sample according to ASTM F84-99 standard, developed by Ostek-Elektro Ltd.Measuring range from 1 µOhm/ to 100 MOhm/ for surface resistivity, from 1 µOhm to 1 MOhm/ for resistivity.Measuring accuracy - not worse than 0,3 %.Accessories:temperature table up to +300 oC;table with vacuum clamp (for measuring samples 6048);shielding chamber.