Available for Import

Photolithography cluster line

Semiconductor Production Equipment

Manufacturer:

Price: Request Quote

Bulk pricing available

FOB, CIF & EXW terms available

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Key Highlights

Made in Russia - engineered for durability
Suitable for challenging environments
Lower cost of ownership than European alternatives
Bulk orders available with volume discounts
Documentation and customs clearance assistance provided

A photolithography cluster line is a set of technological modules carrying out various types of photolithographic processing. The modules are placed in a controlled air environment on a common carrier frame of closed configuration and are united by a single transport device in the form of a specialised robot. The photolithography cluster line combines the operations of photoresist mask formation for the technological process with design standards up to 0.35÷0.18 microns on wafers of 150 and 200 mm diameter and represents high-tech equipment for performing the stages of wafer cleaning, adhesion promoter treatment, photoresist application, drying, thermal stabilisation, developer.

Technical Specifications

Width	2229 mm
Length	3725 mm
Height	2333 mm
Power consumption, max.	Built-in memory card slot, support microSD/SDHC/SDXC card (up to 256GB); manual recording/alarm recording kW
Weight	2050 kg
Loading/unloading module (4 cassettes)	1 pc
Photoresist module	1 pc
Anti-reflection coating module	1 pc
Photoresist developer module	1 pc
Megasonic processing module	1 pc
GMDS vapour processing module	1 pc
Floor type heat treatment module (3 plates)	2 pc
Floor type heat stabilisation module (3 plates)	2 pc
Cluster line transport system - centre robot	1 pc
Bed to accommodate laminar flow purified air supply modules	1 pc
Unit for setting technological programmes for processing and displaying information	1 pc
Cluster line operation control unit	1 pc
Auxiliary equipment for cluster line	1 pc
Unit for preparation and supply of reagents to working positions of modules	1 pc
Photoresist and developer thermal stabilisation and level control unit	1 pc
Unit for receiving and storing spent reagents	1 pc

Note: All specifications are provided by the manufacturer and may be subject to change. Please contact us to confirm the latest specifications before placing your order.

Shipping & Payment Information

Shipping Terms

FOB: Novorossiysk, Russia
CIF: Available to major ports worldwide
EXW: Manufacturer's facility, Russia

Delivery Time

Sea freight: 30-60 days (depending on destination)
Air freight: 14-21 days (for urgent orders)
Production lead time: 30-90 days (depending on order size)

Payment Methods

Letter of Credit (L/C)
Wire Transfer (T/T)
Escrow Services

Order Minimums

We work with orders starting from 1 container
You can mix different products in one container
Volume discounts available for larger orders

Customs & Documentation Support

We provide comprehensive assistance with all export documentation, customs clearance, and logistics arrangements. Our team has extensive experience facilitating international trade with businesses in Africa, Middle East, Asia, and Latin America.

Contact Our Import Specialists

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+971 58 657 4796

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Send Email Inquiry info@tonzar.com

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Schedule a consultation with our import specialists at your convenience.

Business Hours

We're available to assist you during the following hours:

Monday - Friday: 9:00 AM - 6:00 PM (GMT+4)
Saturday: 10:00 AM - 2:00 PM (GMT+4)
Sunday: Closed

Our WhatsApp support is available outside business hours for urgent inquiries.

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Photolithography cluster line

Key Highlights

Technical Specifications