Automatic RF Matching Device SURA-500-50-13 (0.5 kW) — LVT+ LLC

Name: Automatic RF Matching Device SURA-500-50-13 (0.5 kW)
Brand: Beams & Plasmas
SKU: 151167
Availability: InStock

Бренд: Beams & Plasmas

₸427,500 - ₸1,710,000 KZT

MOQ: 2 pieces

Негізгі сипаттамалар

Maximum power: 0,5 kW

Operating frequency: 13,56

purpose: matching variable impedance load with coaxial cable and high-frequency generator output

dust and moisture protection: yes - the block case is made of metal, has no exposed conductive parts.

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Сипаттама

The automatic radio-frequency coordinating device SURA is designed to ensure coordination of the load with variable impedance, with coaxial cable and high-frequency generator output in manual and automatic modes.

The SURA matching device is equipped with:

- emergency interlocking system

- Modbus RTU protocol control

- RS-485 interface

*The device can be supplied in two versions: for inductive and capacitive loads.

Inductive loads - induction gas discharge systems, including radio frequency plasma generators.

Capacitive loads - high frequency magnetron sputtering systems, high frequency bias fed tables, high frequency glow discharge cleaning systems.

Operation manual is available on request: LCMK.303.00.00.00.00.000 RE SOURA-3000-50-13 ADJUSTING DEVICE

Сипаттамалар

Maximum power

0,5 kW

Operating frequency

13,56

purpose

matching variable impedance load with coaxial cable and high-frequency generator output

dust and moisture protection

yes - the block case is made of metal, has no exposed conductive parts.

Type of construction

stationary

Warranty period

1 year

Climatic designs

GOST 15150-69; GOST 15543-70 under normal values of climatic factors of the environment - UHL for placement category 4.2

Power supply voltage

230 ±10% V

Minimum RF power

100 W

Input impedance

SBVVBG ohm

Maximum output current amplitude

75 A

Maximum voltage amplitude

5 kV

Maximum load reactance

150

interface

RS-485

Data transfer protocol

ModBus RTU

Overall dimensions, (length x width x height)

313 x 277 x 172 mm

Weight, not more

7 kg

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Automatic RF Matching Device SURA-500-50-13 (0.5 kW) — LVT+ LLC

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