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首页 / IT与电信 / 射频与微波设备 / Automatic RF Matching Device SURA-500-50-13 (0.5 kW)
首页 IT与电信 射频与微波设备
Automatic RF Matching Device SURA-500-50-13 (0.5 kW)

Automatic RF Matching Device SURA-500-50-13 (0.5 kW) — LVT+ LLC

品牌: Beams & Plasmas
¥6,480 - ¥25,920 CNY
MOQ: 2 pieces

主要特点

Maximum power: 0,5 kW
Operating frequency: 13,56
用途: 将可变阻抗负载与同轴电缆和高频发电机输出匹配
防尘防潮: 是 - 块体外壳由金属制成，没有裸露的导电部分。

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产品描述

The automatic radio-frequency coordinating device SURA is designed to ensure coordination of the load with variable impedance, with coaxial cable and high-frequency generator output in manual and automatic modes.

The SURA matching device is equipped with:

- emergency interlocking system

- Modbus RTU protocol control

- RS-485 interface

*The device can be supplied in two versions: for inductive and capacitive loads.

Inductive loads - induction gas discharge systems, including radio frequency plasma generators.

Capacitive loads - high frequency magnetron sputtering systems, high frequency bias fed tables, high frequency glow discharge cleaning systems.

Operation manual is available on request: LCMK.303.00.00.00.00.000 RE SOURA-3000-50-13 ADJUSTING DEVICE

规格参数

Maximum power
0,5 kW
Operating frequency
13,56
用途
将可变阻抗负载与同轴电缆和高频发电机输出匹配
防尘防潮
是 - 块体外壳由金属制成，没有裸露的导电部分。
Type of construction
固定式
Warranty period
1 year
Climatic designs
GOST 15150-69；GOST 15543-70在正常气候环境因素值下 - UHL用于放置类别4.2
Power supply voltage
230 ±10% V
Minimum RF power
100 W
Input impedance
SBVVBG ohm
Maximum output current amplitude
75 A
Maximum voltage amplitude
5 kV
Maximum load reactance
150
接口
RS-485
Data transfer protocol
ModBus RTU
Overall dimensions, (length x width x height)
313 x 277 x 172 mm
Weight, not more
7 kg

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