
VACUUM UNIT FOR PLASMA CHEMICAL LAYER ETCHING WITH ICP SOURCE AND SLUICE LOADING FROM CASSETTE TO CASSETTE PLASMA TM 300
Bulk pricing available
FOB, CIF & EXW terms available
Key Highlights
- Made in Russia - engineered for durability
- Suitable for challenging environments
- Lower cost of ownership than European alternatives
- Bulk orders available with volume discounts
- Documentation and customs clearance assistance provided
60x48 mm - 19 pcs, Ø 76 mm - 13 pcs, Ø 100 mm - 7 pcs,
Ø 150 mm - 3 pieces, Ø 200 mm - 1 piece, Ø 300 mm - 1 piece;
Sluice chamber for loading - unloading of substrates on the carrier
from cassette to cassette;
Transport system for transferring the substrates on the carrier from the airlock to the working chamber based on the manipulator arm.
working chamber on the basis of manipulator;
Reactor wall heating up to 60°C;
Helium cooling and mechanical clamping of the carrier;
Working gases: Cl?, HBr, SF?, CF?, CHF?, O?, Ar, He and others;
Consumption power not more than 21 kW;
Oil-free pumping system;
Possibility to build in the clean room.
Technical Specifications
Width | 1600 mm |
---|---|
Length | 3200 mm |
Height | 1800 mm |
Note: All specifications are provided by the manufacturer and may be subject to change. Please contact us to confirm the latest specifications before placing your order.
Shipping & Payment Information
Shipping Terms
- FOB: Novorossiysk, Russia
- CIF: Available to major ports worldwide
- EXW: Manufacturer's facility, Russia
Delivery Time
- Sea freight: 30-60 days (depending on destination)
- Air freight: 14-21 days (for urgent orders)
- Production lead time: 30-90 days (depending on order size)
Payment Methods
- Letter of Credit (L/C)
- Wire Transfer (T/T)
- Escrow Services
Order Minimums
- We work with orders starting from 1 container
- You can mix different products in one container
- Volume discounts available for larger orders
Customs & Documentation Support
We provide comprehensive assistance with all export documentation, customs clearance, and logistics arrangements. Our team has extensive experience facilitating international trade with businesses in Africa, Middle East, Asia, and Latin America.
Contact Our Import Specialists
WhatsApp (Recommended)
For fastest response and immediate assistance with pricing, availability, and ordering.
+971 58 657 4796For detailed inquiries, documentation requests, and formal communications.
Send Email Inquiry info@tonzar.comRequest Call Back
Schedule a consultation with our import specialists at your convenience.
Business Hours
We're available to assist you during the following hours:
- Monday - Friday: 9:00 AM - 6:00 PM (GMT+4)
- Saturday: 10:00 AM - 2:00 PM (GMT+4)
- Sunday: Closed
Our WhatsApp support is available outside business hours for urgent inquiries.
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