Microelectronic gauge pressure transmitters with digital indication RTM, RTM-M series Optimal metrological and operational characteristics of transmitters, such as stability, reproducibility and noise immunity of the output signal, are achieved on the basis of application of a sensing element made of monocrystalline silicon, located on a sapphire membrane and a specialised electronic circuit of a high degree of integration with digital signal processing.
The high overload capacity of the transducers is achieved by using a double-layer sapphire-titanium membrane with monocrystalline silicon strain gauges ("silicon-on-sapphire technology"). The monocrystalline sapphire membrane is an ideal elastic element and, when combined with titanium, becomes a leader in terms of deformation.
The high degree of reliability of the sensing element and electronic circuitry does not require correction of the output range during operation.
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