Photolithography Cluster Line - Advanced Processing Modules

Available for Import

Photolithography Cluster Line - Advanced Processing Solutions for Precision

Semiconductor Production Equipment

Manufacturer: NIIPM OJSC

Price: Request Quote

Bulk pricing available

FOB, CIF & EXW terms available

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Description

A photolithography cluster line is a set of technological modules carrying out various types of photolithographic processing. The modules are placed in a controlled air environment on a common carrier frame of closed configuration and are united by a single transport device in the form of a specialised robot. The photolithography cluster line combines the operations of photoresist mask formation for the technological process with design standards up to 0.35÷0.18 microns on wafers of 150 and 200 mm diameter and represents high-tech equipment for performing the stages of wafer cleaning, adhesion promoter treatment, photoresist application, drying, thermal stabilisation, developer.

Specifications

Width

2229 mm

Length

3725 mm

Height

2333 mm

Power consumption, max.

Built-in memory card slot, support microSD/SDHC/SDXC card (up to 256GB); manual recording/alarm recording kW

Weight

2050 kg

Loading/unloading module (4 cassettes)

1 pcs

Photoresist module

1 pcs

Anti-reflection coating module

1 pcs

Photoresist developer module

1 pcs

Megasonic processing module

1 pcs

GMDS vapour processing module

1 pcs

Floor type heat treatment module (3 plates)

2 pcs

Floor type heat stabilisation module (3 plates)

2 pcs

Cluster line transport system - centre robot

1 pcs

Bed to accommodate laminar flow purified air supply modules

1 pcs

Unit for setting technological programmes for processing and displaying information

1 pcs

Cluster line operation control unit

1 pcs

Auxiliary equipment for cluster line

1 pcs

Unit for preparation and supply of reagents to working positions of modules

1 pcs

Photoresist and developer thermal stabilisation and level control unit

1 pcs

Unit for receiving and storing spent reagents

1 pcs

Note: All specifications are provided by the manufacturer and may be subject to change. Please contact us to confirm the latest specifications before placing your order.

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Delivery & Payment

Shipping Terms

FOB Novorossiysk, Russia CIF Available to major ports worldwide EXW Manufacturer's facility, Russia

Delivery Time

Sea freight: 30-60 days (depending on destination) Air freight: 14-21 days (for urgent orders)

Payment Methods

Letter of Credit (L/C) Wire Transfer (T/T) Escrow Services

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Photolithography Cluster Line - Advanced Processing Solutions for Precision

Description

Specifications

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