Compact Plasma Cleaning Vacuum System for Sterilization and Photoresist Removal

Group treatment of 20 plates Ø 100, 150 mm placed in a quartz boat; Sterilisation of medical instruments, devices, containers, utensils, etc...; Working gases: O?, N?; Maintaining stable HF discharge in the range of working pressures 10-100Pa; Microprocessor control system; Forvacuum pumping system; Consumption power not more than 4.5 kW; Possibility to build in a clean room.