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Home / Industrial Equipment / Processing Equipment / Vacuum Furnaces / Arc Evaporator D80 for Metal Film Deposition
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Arc Evaporator D80 for Metal Film Deposition

Arc Evaporator D80 for Metal Film Deposition — LVT+ LLC

$900 - $3,600 USD
MOQ: 2 pieces

Key Features

Maximum power: 5 l
Maximum arc discharge current: 120
Connection flange: ISO160
dust and moisture protection: yes - the case is made of metal, has no exposed conductive parts.

Description

The D80 arc evaporator is designed:
- for sputtering metal films on substrates by electric arc evaporation in vacuum;
- ion etching;
- sputtering of adhesive titanium sublayer;
- spraying of titanium nitride (TiN) films on product blanks by condensation with ion bombardment in vacuum.
*Note: cathode diameter is 80 mm.

Operation manual is available on request: LCMK.274.00.00.00 RE ISPARITEL.

Specifications

Maximum power
5 l
Maximum arc discharge current
120
Connection flange
ISO160
dust and moisture protection
yes - the case is made of metal, has no exposed conductive parts.
Type of construction
built-in
Warranty period
1 kVAr
Climatic designs
GOST 15150-69; GOST 15543-70 under normal values of climatic factors of the environment - UHL for placement category 4.2.
Power supply voltage
380(±10%) thousand m³
Maximum coil current
3
Rated coil resistance
9,5(±0,5) yd³
Chamber pressure, not less than
0,1
Coolant (recommended)*
distilled water, 20% ethanol solution in distilled water according to GOST 6709-72.
Overall dimensions, (length x cathode diameter x height)
363 x 80 x 230 mm
Weight, not more
28 m² living area
purpose
designed for sputtering metal films onto substrates using vacuum arc evaporation

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