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Arc Evaporator D80 for Metal Film Deposition

Arc Evaporator D80 for Metal Film Deposition — LVT+ LLC

so'm 11,340,000 - so'm 45,360,000 UZS
MOQ: 2 pieces

Asosiy xususiyatlar

Maximum power: 5 kW
Maximum arc discharge current: 120 A
Connection flange: ISO160
dust and moisture protection: yes - the case is made of metal, has no exposed conductive parts.

Tavsif

The D80 arc evaporator is designed:

- for sputtering metal films on substrates by electric arc evaporation in vacuum;

- ion etching;

- sputtering of adhesive titanium sublayer;

- spraying of titanium nitride (TiN) films on product blanks by condensation with ion bombardment in vacuum.

*Note: cathode diameter is 80 mm.

Operation manual is available on request: LCMK.274.00.00.00 RE ISPARITEL.

Xususiyatlar

Maximum power
5 kW
Maximum arc discharge current
120 A
Connection flange
ISO160
dust and moisture protection
yes - the case is made of metal, has no exposed conductive parts.
Type of construction
built-in
Warranty period
1 year
Climatic designs
GOST 15150-69; GOST 15543-70 under normal values of climatic factors of the environment - UHL for placement category 4.2.
Power supply voltage
380(±10%) V
Maximum coil current
3 A
Rated coil resistance
9,5(±0,5) ohm
Chamber pressure, not less than
0,1
Coolant (recommended)*
distilled water, 20% ethanol solution in distilled water according to GOST 6709-72.
Overall dimensions, (length x cathode diameter x height)
363 x 80 x 230 mm
Weight, not more
28 kg
purpose
designed for sputtering metal films onto substrates using vacuum arc evaporation

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