Products — Industrial Automation
Multi-layer Structure Physical Vapor Deposition System Feba 4MI-100-G
US$90,000-300,000
Kinematic productivity (conditional process 40 s/chamber):
30 plates/hour
Introduced defectivity, not more:
Particles larger than 0,3 µm, not more than 0,1 pcs./cm2
QUANT LLC 🇷🇺