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Plasma Radiofrequency Generator RPG-128 (Short Input Version)

Plasma Radiofrequency Generator RPG-128 (Short Input Version) — LVT+ LLC

Brend: RPG
so'm 18,900,000 - so'm 60,480,000 UZS
MOQ: 2 pieces

Asosiy xususiyatlar

Maximum RF power input: 1500 W
version: 02 type (with shortened input)
purpose: creating and maintaining low-temperature gas discharge plasma in working volumes of vacuum technological installations in continuous mode.
dust and moisture protection: yes

Tavsif

The electrodeless radio-frequency plasma generator is designed for creation and maintenance of gas-discharge low-temperature plasma in working volumes of vacuum technological installations in continuous mode and is used at:

- material sputtering in plasma of inert or chemically active gases

- ion and plasma chemical etching

- evaporation, with additional vapour ionisation

- plasma-stimulated vapour deposition

- ionic surface modification (oxidation, reduction, nitriding, carbidisation)

- ionic cleaning and assisted

- high-temperature annealing

The RPG-128 is equipped with:

- flat coil

- removable quartz glass shield to protect the working surface

- coaxial input with shank for connection of RF power source

*Operational Manual is available on request: LCMK.219.00.00.00.00.000-02 RE Radiofrequency PLASMA GENERATOR RPG-128

It is allowed to deliver the device as a part of the installation without packing.

Xususiyatlar

Maximum RF power input
1500 W
version
02 type (with shortened input)
purpose
creating and maintaining low-temperature gas discharge plasma in working volumes of vacuum technological installations in continuous mode.
dust and moisture protection
yes
cooling
water
Type of construction
built-in
Warranty period
1 year
Climatic designs
GOST 15150-69; GOST 15543-70 under normal values of climatic factors of the environment - UHL for placement category 4.2
Operating frequency of the generator for excitation of gas-discharge low-temperature plasma
13.56
Minimum RF power
300 W
Minimum distance between the working plane of the device and conductive parts, not less than
45 mm
Operating pressure range
0.1...10
Ion current density on the treated sample located at a distance from the working plane of the device 150 mm, not less than m
10
Working gas
any that does not cause deposition of low-resistance layers on device parts
Minimum diameter of the cylindrical working chamber with axial arrangement of the device
150 mm
Minimum coolant flow rate, not less than l/min
1,5
Minimum pressure difference between coolant supply and coolant drain
0,2 MPa
Overall dimensions, (total length x housing diameter x housing height x input diameter x input length)
278 x 150 x 82 x 56 x 120 mm
Weight, not more
4 kg

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