Microelectronic Pressure Transducers with Open Diaphragm for Accurate Measurements

Microelectronic pressure transducers with open diaphragm RTM-M series have optimal metrological and operational characteristics of the transducers, such as stability, reproducibility and noise immunity of the output signal, achieved on the basis of the application of a sensing element made of monocrystalline silicon, located on a sapphire diaphragm and a specialised electronic circuit of high degree of integration with digital signal processing. The high overload capacity of the transducers is achieved by using a double-layer sapphire-titanium membrane with monocrystalline silicon strain gauges ("silicon-on-sapphire technology"). The monocrystalline sapphire membrane is an ideal elastic element and, when combined with titanium, becomes a leader in terms of deformation. The high degree of reliability of the sensing element and electronic circuitry does not require correction of the output range during operation. Digital correction of the initial ...