C series microelectronic force transducers

Microelectronic strain gauges of the C series are designed for force conversion. New solutions in pressure measurement - Silicon on Sapphire technology. The sensing element of the strain gauges is a two-layer sapphire-titanium membrane with monocrystalline silicon strain gauges. Monocrystalline sapphire membrane is an ideal elastic element and in combination with titanium it acquires the leading quality in terms of deformation level, retains elastic properties up to +400°?. Monocrystalline silicon strain gauges are connected to sapphire at the atomic level (heteroepitaxy method) and work practically without hysteresis and fatigue phenomena in time. Unique insulating properties and radiation resistance of sapphire allow to operate the sensitive element in the temperature range from -200 to +350°C, at high electromagnetic interference and radiation exposure. Strain-sensitive elements are manufactured by group methods of solid-state technology of micro...