The CLS 5000 series excimer laser is a laser with transverse electric discharge in a high-pressure gas mixture (with HV semiconductor switch). These lasers are characterised by compactness, high stability of average power, high lifetime of gas mixture, are made in a single module with computer control of all preparation and work processes.
The CLS 5000 series laser is designed for use both as a part of various installations and separately as a source of powerful coherent pulsed-periodic UV radiation. Characteristic features of the laser: High spatial stability of the laser beam High angular stability of the laser beam.
High pulse repetition rate. Solid-state commutator.
Compact excimer laser. Built-in oil-free vacuum pump and gas filter.
Integrated pulse energy sensor. Output energy stabilisation.
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