The unit NIKA-15101 is equipped with two magnetrons-787 and two linear arc evaporators LDI, is designed for preparation and deposition of high density coatings (AlTiN, AlTiSiN,TiB2) for end tools and cutting inserts with deposition rate not less than 1.9 microns/hour, ion-plasma low-temperature nitriding of workpiece surface, application of various coatings:
- hardening coatings: AlTiN, AlCrN, AlSiTiN, AlSiCrN;
- multiphase coatings: -TiN/nc-AlN, nc-TiAlN/a-Si3N4, etc;
- heat-resistant and heat-resistant coatings.
- surface nitriding
Coating methods and technologies: PVD, CVD, HiPIMS, CAE, CMS, PECVD, PN/C, PARNS, IPVD based on vacuum arc vaporisation (ARC) or similar method.
The unit realises the use of combined methods of sputtering by selecting interchangeable technological devices.
Operating manual available on request.
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