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Deep Anisotropic Etching Vacuum System MVU TM PLASMA 06

Deep Anisotropic Etching Vacuum System MVU TM PLASMA 06 — NIITM OJSC

品牌: PLASMA

¥302,400 - ¥1,080,000 CNY

MOQ: 1 pieces

主要特点

宽度: 1450 mm

长度: 800 mm

高度: 1520 mm

供应商信息

NIITM OJSC

🇷🇺 📦 🏭 🛡️

查看全部产品 (18)

快速询价

产品描述

Individual substrate processing in one process cycle:

Up to Ø 150 mm - 1 pc;

Measurement of RF displacement on RF electrode - substrate holder

in the range from 0 to 1000 V;

Regulation and automatic maintenance of power level

RF power level in the range from 30 to 200 W;

Regulation and automatic maintenance of power level

HF ICP plasma source in the range of 400 - 600 W;

Working gases: Ar, SF?, C?F?;

Oil-free pumping system;

Microprocessor control system;

Consumption power not more than 5.5 kW.

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