Microelectronic strain gauge overpressure transmitters with temperature sensor MP-PT series are designed for proportional conversion of pressure and temperature into electrical signals. Sensing element of strain gauges is a two-layer sapphire-titanium membrane with monocrystalline silicon strain gauges. Monocrystalline sapphire membrane is an ideal elastic element and in combination with titanium it acquires the leading quality in terms of deformation level, retains elastic properties up to +400°?. Monocrystalline silicon strain gauges are connected with sapphire at the atomic level (heteroepitaxy method) and work practically without hysteresis and fatigue phenomena in time. The strain-sensitive elements are manufactured by group methods of solid-state microelectronics technology and have high quality and good reproducibility of output parameters. The temperature sensor is a thin-film platinum resistor on a ceramic substrate.
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