Microelectronic gauge pressure transducers of TM series are designed for proportional conversion of pressure into electric signal. New solutions in pressure measurement - "Silicon on Sapphire" technology.
Sensitive element of strain gauges is a two-layer sapphire-titanium membrane with monocrystalline silicon strain gauges. Monocrystalline sapphire membrane is an ideal elastic element and in combination with titanium it acquires the leading quality in terms of deformation level, retains elastic properties up to +400°?.
Monocrystalline silicon strain gauges are connected to sapphire at the atomic level (heteroepitaxy method) and work practically without hysteresis and fatigue phenomena in time. Unique insulating properties and radiation resistance of sapphire allow to operate the sensitive element in the temperature range from -200 to +350°C, at high electromagnetic interference and radiation exposure.
The strain-sensitive elements are made of...
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