Plasma Radio Frequency Generator RPG-128 with Extended Input

Available for Import

Plasma Radio Frequency Generator RPG-128 for Continuous Low-Temperature Plasma Generation

Electric Signal Generators

Manufacturer: LVT+ LLC

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FOB, CIF & EXW terms available

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Description

The electrodeless radio-frequency plasma generator is designed to create and maintain gas-discharge low-temperature plasma in the working volumes of vacuum process units in continuous mode and is used in: <ul> <li>- material sputtering in plasma of inert or chemically active gases</li> <li>ion and plasma chemical etching</li> <li>evaporation, with additional vapour ionisation</li> <li>plasma-stimulated vapour deposition</li> <li>ionic surface modification (oxidation, reduction, nitriding, carbidisation, etc.)</li> <li>ionic cleaning and assisted</li> <li>high-temperature annealing</li> </ul> The RPG-128 is equipped with: <ul> <li>- flat coil</li> <li>removable quartz glass shield to protect the working surface</li> <li>coaxial input with shank for connection of RF power source</li> </ul> *Operational Manual is available on request: LCMK.219.00.00.00.00.000-04 RE Radiofrequency PLASMA GENERATOR RPG-128 It is allowed to deliver the device as a part of the installation without packing.

Specifications

Execution

04 type (with extended inlet)

Assignment

Creation and maintenance of gas-discharge low-temperature plasma in working volumes of vacuum technological installations in continuous mode.

Dustproof

Got it

Cooling

water

Type of construction

Built-in

Warranty period

1 year

Climatic designs

GOST 15150-69; GOST 15543-70 at normal values of climatic factors of the environment - UHL for product placement category 4.2

Operating frequency of the generator for excitation of gas-discharge low-temperature plasma

13,56

Maximum RF power input

1500 W

Minimum RF power

300 W

Minimum distance between the working plane of the device and conductive parts, not less than

45 mm

Working gas

Any that does not cause deposition of low-resistance layers on device parts

Operating pressure range

0,1 -10

Ion current density on the treated sample located at a distance from the working plane of the device 150 mm, not less than m

Minimum diameter of the cylindrical working chamber with axial arrangement of the device

150 mm

Minimum coolant flow rate, not less than l/min

1.5

Minimum pressure difference between coolant supply and coolant drain

0,2 MPa

Overall dimensions, (total length x housing diameter x housing height x input diameter x input length)

418x50x82x56x260 mm

Weight, not more

4 kg

Note: All specifications are provided by the manufacturer and may be subject to change. Please contact us to confirm the latest specifications before placing your order.

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Shipping Terms

FOB Novorossiysk, Russia CIF Available to major ports worldwide EXW Manufacturer's facility, Russia

Delivery Time

Sea freight: 30-60 days (depending on destination) Air freight: 14-21 days (for urgent orders)

Payment Methods

Letter of Credit (L/C) Wire Transfer (T/T) Escrow Services

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Plasma Radio Frequency Generator RPG-128 for Continuous Low-Temperature Plasma Generation

Description

Specifications

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