Realised application technologies:
-magnetron application of thin films:
-metals, resistive alloys, other conductive materials;
-dielectrics by reactive sputtering;
-dielectric materials by high-frequency magnetron sputtering.
Other methods of thin film deposition are:
-thermal evaporation using a resistive evaporator;
-thermal evaporation using electron heating (ring cathode);
-ion-beam sputtering
The units provide:
stabilisation of the set flow rate of process gases on three channels and control of gas flow rate on each channel;
automatic execution of programmes "from loading to unloading".
The units can be equipped with a set of technological devices:
magnetrons, ion sources, thermal vaporisers, ion sputtering devices
and heaters.
The technology can be tested and subsequently transferred
It can be transferred to the ordered installation under the Customer's technology.
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