The main features of the machine for micro-milling of large-sized flat optical parts:
- the basic elements of the machine are made of natural granite;
- linear displacement unit is made on aerostatic supports with porous throttling and vacuum tensioning;
- the spindle unit of the machine is made using spherical aerostatic supports with porous throttling;
- the machine is equipped with a vibration isolation system with natural vibration frequency not exceeding 1 Hz;
- the discreteness of the programmable linear movement is 10 nm;
- the machine is equipped with direct-acting electric drives based on motors with reduced vibration activity;
- in-built chip evacuation system;
-special vacuum plate made of porous ceramic for workpiece mounting;
- manual tool plunge mechanism with a discreteness of 1 µm.
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