The automatic radio-frequency coordinating device SURA is designed to ensure coordination of the load with variable impedance, with coaxial cable and high-frequency generator output in manual and automatic modes.
The SURA matching device is equipped with:
- emergency interlocking system
- Modbus RTU protocol control
- RS-485 interface
*The device can be supplied in two versions: for inductive and capacitive loads.
Inductive loads - induction gas discharge systems, including radio frequency plasma generators.
Capacitive loads - high frequency magnetron sputtering systems, high frequency bias fed tables, high frequency glow discharge cleaning systems.
Operation manual is available on request: LCMK.303.00.00.00.00.000 RE SOURA-3000-50-13 ADJUSTING DEVICE
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