Plasma Chemical Anisotropic Selective Etching System Plasma TM 200-01
US$90,000-300,000
Width:
2000
Length:
4000
NIITM OJSC 🇷🇺
Remote Plasma Photoresist Etching System Vega VS-100-G
US$15,000-48,000
Self-diagnostic function when the plant is switched on:
Yes; no
Introduced defectivity, not more:
Particles larger than 0.3 microns, not exceeding 0.06 particles/cm2
QUANT LLC 🇷🇺
Plasma Etching Vacuum System with ICP Plasma Source TM 9
US$90,000-300,000
Width:
2500
Length:
3350
NIITM OJSC 🇷🇺