PECVD System for Handling and Moving Silicon Wafers with Advanced Functionality

The unit, which performs work with PECVD reactors located at a distance from each other with simultaneous loading/unloading of semi-finished products to/from the reactors, and has extended functionality for the possibility of application in the mode of continuous production in conjunction with PECVD units type KAI A-type and KAI B-type in order to automate the process of loading and unloading of PECVD pallets with silicon wafers, automatic turning of wafers after removal from pallets after KAI A-type before stacking on pallets for processing on KAI B-type, rejection of wafers processed on KAI B-type according to photoluminescence image with optional integration of the unit into the current LCS photovoltaic semiconductor converter production automation system.
The silicon wafers are further used to assemble photovoltaic solar panels (semiconductor devices) for power generation.