Vacuum cryogenic pump - one of the types of modern high-vacuum pumps designed to obtain ultra-high vacuum (up to 10^-8 Pa) free from organic contaminants. The pumps pump out all air components, including helium and hydrogen, without introducing their own organic contaminants into pumped volumes.
The company produces a parametric range of vacuum cryogenic pumps with diameters of nominal bore (DM) from 160 to 900 mm. Vacuum cryogenic pumps consist of two main units: cryo-pumping unit and compressor unit connected by flexible pipelines.
Depending on the nominal bore diameter and operating conditions, the pumps are equipped with one or several cryogenic refrigerators operating according to the Gifford-McMahon cycle. The main elements of the compressor unit are: compressor (rotary or scroll type) for compression of the working gas, oil separator and adsorber for removal of oil and mechanical impurities from the compressed gas
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