Arc Evaporator D80 for Metal Film Deposition

Arc Evaporator D80 for Metal Film Deposition

$900 - $3,600 USD

MOQ: 2 pieces

Key Features

Maximum power: 5 l

Maximum arc discharge current: 120

Connection flange: ISO160

Dustproof: Tie - The case is made of metal, has no exposed live parts.

Supplier Information

LVT+ LLC

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Description

The D80 arc evaporator is designed:
- for sputtering metal films on substrates by electric arc evaporation in vacuum;
- ion etching;
- sputtering of adhesive titanium sublayer;
- spraying of titanium nitride (TiN) films on product blanks by condensation with ion bombardment in vacuum.
*Note: cathode diameter is 80 mm.

Operation manual is available on request: LCMK.274.00.00.00 RE ISPARITEL.

Specifications

Maximum power

5 l

Maximum arc discharge current

120

Connection flange

ISO160

Dustproof

Tie - The case is made of metal, has no exposed live parts.

Type of construction

Built-in

Warranty period

1 kVAr

Climatic designs

GOST 15150-69; GOST 15543-70 at normal values of climatic factors of external environment - UHL for product placement category 4.2.

Power supply voltage

380(±10%) thousand m³

Maximum coil current

3

Rated coil resistance

9,5(±0,5) yd³

Chamber pressure, not less than

0,1 t

Coolant (recommended)*

Distilled water, 20 % solution of ethyl alcohol in distilled water according to GOST 6709-72.

Overall dimensions, (length x cathode diameter x height)

363x80x230 mm

Weight, not more

28 m² living area

Assignment

Designed for sputtering metal films on substrates by electric arc evaporation in vacuum.

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