Molecular layering unit (Atomic Layer Deposition) is designed for layering of functional, canfor nanocoatings with thickness from 1nm on substrates made of various materials. Nanocoatings can be oxides, nitrides, fluorides, fulphides etc.
Applications:
-microelectronics;
-nanoelectronics;
-sensor instrumentation;
-solar power engineering;
-sorption and catalytic processes;
-membrane technologies;
-creation of renewable energy sources;
-drug medicine.
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