Type and number of MRUs in the installation:
Magna 11, DC - 2 pcs;
Magna 12, DC - 1 pc, HF - 1 pc;
Group processing of substrates in one technological cycle
(single-sided processing): Ø100 mm - 4 pcs, Ø150 mm - 2 pcs;
(double-sided processing): 60x48 - 6 pcs;
Periodic 90° rotation of the substrate holder;
Number of ion sources - 1 pc;
Microprocessor control system;
Oil-free pumping system;
Consumption power not more than 4,5 kVT.
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